A class of silicon micromachined metasurface for the design of high-gain terahertz antennas
David González-Ovejero (California Institute of Technology)
Theodore Reck (California Institute of Technology)
Cecile Jung-Kubiak (California Institute of Technology)
M. Alonso-Delpino (California Institute of Technology)
G. Chattopadhyay (California Institute of Technology)
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Abstract
We explore the use of a class of metasurface (MTS), which consists of metalized cylinders arranged in a square lattice and placed on a ground plane, for the realization of antennas at terahertz (THz) frequencies. This MTS is particularly appropriate for being micromachined out of a silicon wafer by means of deep reactive ion etching (DRIE).
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