Thermally regenerable optical transparent MEMS windows for exhaust gas analysis
M. Amir Ghaderi (TU Delft - Electronic Instrumentation, Chalmers University of Technology)
Luke Middelburg (TU Delft - Electronic Components, Technology and Materials)
David Bilby (Ford Motor Company)
Jaco Visser (Ford Motor Company)
Per Lundgren (Chalmers University of Technology)
Peter Enoksson (Chalmers University of Technology)
Reinoud F. Wolfenbuttel (Chalmers University of Technology, TU Delft - Electronic Instrumentation)
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Abstract
Exhaust gas measurement in the harsh environment of the tailpipe by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of soot. The design, fabrication, and testing of membranes in SiC-on-Si with integrated heaters to serve as a regenerable MEMS optical window into the tailpipe are presented. Membranes at slightly elevated temperatures are demonstrated to keep the surface transparent by thermophoresis, while surface regeneration is achieved at pulsed high temperatures, which allows long-term optical measurement in the exhaust.
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