IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing
T Moh (TU Delft - OLD ChemE/Organic Materials and Interfaces)
Y.. Maruyama (TU Delft - Signal Processing Systems)
C Shen (TU Delft - Electronic Components, Technology and Materials)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
Louis C.P.M. de Smet (TU Delft - OLD ChemE/Organic Materials and Interfaces)
HD Tong (External organisation)
C. van Rijn (External organisation)
Ernst Sudhölter (TU Delft - OLD ChemE/Organic Materials and Interfaces)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
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