IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

T Moh (TU Delft - OLD ChemE/Organic Materials and Interfaces)

Y.. Maruyama (TU Delft - Signal Processing Systems)

C Shen (TU Delft - Electronic Components, Technology and Materials)

G. Pandraud (TU Delft - Electronic Components, Technology and Materials)

Louis C.P.M. de Smet (TU Delft - OLD ChemE/Organic Materials and Interfaces)

HD Tong (External organisation)

C. van Rijn (External organisation)

Ernst Sudhölter (TU Delft - OLD ChemE/Organic Materials and Interfaces)

Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)