IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

Conference Paper (2011)
Author(s)

T Moh (TU Delft - OLD ChemE/Organic Materials and Interfaces)

Y.. Maruyama (TU Delft - Signal Processing Systems)

C Shen (TU Delft - Electronic Components, Technology and Materials)

G. Pandraud (TU Delft - Electronic Components, Technology and Materials)

Louis C.P.M. de Smet (TU Delft - OLD ChemE/Organic Materials and Interfaces)

HD Tong (External organisation)

C. van Rijn (External organisation)

Ernst Sudhölter (TU Delft - OLD ChemE/Organic Materials and Interfaces)

Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
OLD ChemE/Organic Materials and Interfaces
DOI related publication
https://doi.org/10.1109/TRANSDUCERS.2011.5969796
More Info
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Publication Year
2011
Language
English
Research Group
OLD ChemE/Organic Materials and Interfaces
Pages (from-to)
1590-1593
ISBN (print)
978-1-4577-0156-6

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