5 records found
1
Silicon nanowire FET arrays for real time detection of chemical activation of cells
IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing
Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces
Developer etched single and arrays of three {100} planes silicon nanowires (SiNWs) FET
Biosensing