Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces
Poster
(2011)
Author(s)
T Moh (TU Delft - OLD ChemE/Organic Materials and Interfaces)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
Louis C P M de Smet (TU Delft - OLD ChemE/Organic Materials and Interfaces)
C. van Rijn (External organisation)
Ernst J. R. Sudhölter (TU Delft - OLD ChemE/Organic Materials and Interfaces)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
OLD ChemE/Organic Materials and Interfaces
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More Info
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Publication Year
2011
Language
English
Research Group
OLD ChemE/Organic Materials and Interfaces
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