Gas-phase deposition of thin aluminium oxide films at ambient conditions

Valdesueiro Gonzalez, David

Gas-phase deposition of thin aluminium oxide films at ambient conditions

Doctoral thesis (2015)

Authors

David Valdesueiro Gonzalez ChemE/Product and Process Engineering

Research Group

ChemE/Product and Process Engineering

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Published Date

2015

Language

English

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Research Group

ChemE/Product and Process Engineering

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