Nano particle filtration module for lap on a chips devices
Conference Paper
(2010)
Author(s)
C Shen (TU Delft - Electronic Components, Technology and Materials)
HTM Pham (TU Delft - Old - EWI Sect. ECTM)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/MEMSYS.2010.5442394
To reference this document use:
https://resolver.tudelft.nl/uuid:48af098b-a690-4900-8467-dd07ee1c733c
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1067-1070
ISBN (print)
978-1-4244-5763-2
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