Reset based Skyhook damping

A nonlinear control method for improved transient response.

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Abstract

As the age of industry 4.0 evolves expeditiously, the demand for improved performance in the high-tech industry is rapidly increasing. Industries such as the semiconductor, optical, and metrology have a higher standard in regards of precision to enhance throughput rates and reduce production times between its various stages. The complex machines operating in such conditions are often exposed to structural or ambient vibrations, which pose a challenge to throughput rates. Hence it is a primary need to isolate the system from these vibrations by quickly damping them before it hampers the system process.

In this thesis, a novel approach to active vibration isolation using skyhook damping is undertaken by introducing a reset-based bandpass filter. This filter is used to achieve finite-time vibration isolation for a damped metrology frame, and its development is inspired by the success of switch-based control in active isolation. The effectiveness of the filter is numerically tested for multiple types of vibration disturbances for improved transient damping characteristics, These findings are compared to a linear counterpart of the filter, demonstrating the benefit of applying reset control for improving transient performance.