Some recent developments in chemical vapor deposition process and equipment modelling.

Journal Article (1999)
Author(s)

Chris R. Kleijn (TU Delft - Old - sect Kramers Laboratory (MSP/FT))

KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))

M Okkerse-Ruitenberg (TU Delft - Old - sect Kramers Laboratory (MSP/FT))

H van Santen (TU Delft - Old - sect Kramers Laboratory (MSP/FT))

Harry E.A. Van den Akker (TU Delft - Old - sect Kramers Laboratory (MSP/FT))

Research Group
Old - sect Kramers Laboratory (MSP/FT)
More Info
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Publication Year
1999
Research Group
Old - sect Kramers Laboratory (MSP/FT)
Issue number
Pr8
Volume number
9
Pages (from-to)
117-132

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