Effects of gate oxide deposition methods on excimer laser crystallized poly-Si thin film transistors
Conference Paper
(1999)
Author(s)
BD van Dijk (TU Delft - Electronic Components, Technology and Materials)
GJ Bertens (TU Delft - Electronic Components, Technology and Materials)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:4d5952f1-cd43-4d62-9bfc-9c2f91d7f145
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
335-338
ISBN (print)
3-8007-2478-2
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