SEM resolution improvement at low voltage with gun monochromator.
Conference Paper
(2000)
Author(s)
JE Barth (TU Delft - ImPhys/Charged Particle Optics)
MD Nijkerk (TU Delft - ImPhys/Charged Particle Optics)
HW Mook (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:4f2b6dda-457a-4577-a1b8-c5376eccfc77
More Info
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Publication Year
2000
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
437-438
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