SEM resolution improvement at low voltage with gun monochromator.

Conference paper (2000)

Authors

JE Barth ImPhys/Charged Particle Optics
MD Nijkerk ImPhys/Charged Particle Optics
HW Mook ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2000

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics