Waferstepper alignment for MEMS applications using diffraction gratings
Conference Paper
(2002)
Author(s)
H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
K Simon (External organisation)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
W van Buel (External organisation)
CQ Gui (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:4f31d6b6-9cd0-425b-8ee0-2c4dc78e7126
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
235-240
ISBN (print)
1-55899-665-6
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