Waferstepper alignment for MEMS applications using diffraction gratings

Conference paper (2002)

Authors

H.W. van Zeijl Electronic Components, Technology and Materials - EEMCS
K Simon External organisation
JHCM Slabbekoorn Electronic Components, Technology and Materials - EEMCS
W van Buel External organisation
CQ Gui External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2002

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials