Process for low temperature deposition of strain gauge materials based on chromium nitride thin films
Conference Paper
(2011)
Author(s)
HA Mol (External organisation)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICSENS.2011.6127044
To reference this document use:
https://resolver.tudelft.nl/uuid:4f61a05e-3394-4661-9898-5aed7461d935
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Publication Year
2011
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
226-229
ISBN (print)
978-1-4244-9288-6
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