Process for low temperature deposition of strain gauge materials based on chromium nitride thin films

Mol, HA; Sarro, PM; Schellevis, H.

Process for low temperature deposition of strain gauge materials based on chromium nitride thin films

Conference paper (2011)

Authors

HA Mol External organisation

PM Sarro Electronic Components, Technology and Materials

H. Schellevis Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2011

Language

English

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Research Group

Electronic Components, Technology and Materials

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