Electrical and physical properties of polysilicon film resistors modified by excimer laser annealing

Conference paper (2000)

Authors

FM Soares Microwave Technology and Systems for Radar
MR van den Berg Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
C.C.G. Visser Electronic Components, Technology and Materials - EEMCS
K Grimm External organisation
JW Slotboom Electronic Components, Technology and Materials - EEMCS
Research Group
Microwave Technology and Systems for Radar
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Microwave Technology and Systems for Radar