Electrical and physical properties of polysilicon film resistors modified by excimer laser annealing
Conference Paper
(2000)
Author(s)
FM Soares (TU Delft - Microwave Technology and Systems for Radar)
MR van den Berg (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
CCG Visser (TU Delft - Electronic Components, Technology and Materials)
K Grimm (External organisation)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Microwave Technology and Systems for Radar
To reference this document use:
https://resolver.tudelft.nl/uuid:50ad7f0d-e55e-4aef-8531-b2d3e2a1ed34
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Publication Year
2000
Research Group
Microwave Technology and Systems for Radar
Pages (from-to)
235-238
ISBN (print)
1-86125-129-7
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