Demonstration of PECVD SiC-SiO2-SiC horizontal slot waveguides
Journal Article
(2010)
Author(s)
Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)
AB Neira (External organisation)
E Margallo Balbas (TU Delft - Electronic Instrumentation)
C. Yang (TU Delft - Electronic Instrumentation)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:5278315b-4d34-4608-aeb1-4c6e6a170ca7
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
6
Volume number
22
Pages (from-to)
398-400
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