Crystallographic orientation- and location-controlled Si single grains on an amorphous substrate for large area electronics

Doctoral thesis (2007)

Authors

Contributors

C.I.M. Beenakker (promotor)
Faculty
Electrical Engineering, Mathematics and Computer Science (EEMCS) (TU Delft)
Copyright: © 2007 M. He
Excimer laser crystallization &mu -Czochralski (grain filter) process Crystallographic orientation control Thin film transistor
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Published Date

10-09-2007

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ISBN:

978-90-8559-306-5

Faculty

Electrical Engineering, Mathematics and Computer Science