Silicon laser annealing by a two-pulse laser system with variable pulse offsets

Conference Paper (2007)
Authors

V Gonda (TU Delft - Electronic Components, Technology and Materials)

J Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4

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