Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)
Journal Article
(2012)
Author(s)
N. Kumar (TU Delft - ImPhys/Optics)
O. El Gawhary (TU Delft - ImPhys/Optics)
VG Kutchoukov (TU Delft - ImPhys/Charged Particle Optics)
S.F. Pereira (TU Delft - ImPhys/Optics)
W Coene (External organisation)
Paul Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:536d744e-62d0-4432-b428-94757a07829d
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Publication Year
2012
Language
English
Research Group
ImPhys/Optics
Volume number
8324
Pages (from-to)
1-8
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