Design of a next generation 6 DoF stage for scanning applications in vacuum with nanometer accuracy and mGauss magnetic stray field

Conference paper (2004)

Authors

A de Klerk External organisation
GZ Angelis External organisation
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design