Buried silicon dioxide formation in a precursor nanocavity layer in Si

Journal Article (2004)
Author(s)

A van Veen (TU Delft - Old - Section Defects in Materials)

A Rivera (TU Delft - Old - Section Defects in Materials)

H. Schut (TU Delft - Old - Section Defects in Materials)

H van Gog (External organisation)

Research Group
Old - Section Defects in Materials
More Info
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Publication Year
2004
Research Group
Old - Section Defects in Materials
Volume number
216
Pages (from-to)
264-268

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