Buried silicon dioxide formation in a precursor nanocavity layer in Si

Journal article (2004)

Authors

A van Veen Old - Section Defects in Materials
A Rivera Old - Section Defects in Materials
H. Schut Old - Section Defects in Materials
H van Gog External organisation
Research Group
Old - Section Defects in Materials
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Published Date

2004

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials