Buried silicon dioxide formation in a precursor nanocavity layer in Si
Journal Article
(2004)
Author(s)
A van Veen (TU Delft - Old - Section Defects in Materials)
A Rivera (TU Delft - Old - Section Defects in Materials)
H. Schut (TU Delft - Old - Section Defects in Materials)
H van Gog (External organisation)
Research Group
Old - Section Defects in Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:553b6f0a-2e51-408c-9c97-8fb14aca30a2
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Publication Year
2004
Research Group
Old - Section Defects in Materials
Volume number
216
Pages (from-to)
264-268
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