Design, fabrication and testing of assembly features for enabling sub-micron accurate passive alignment of photonic chips on a silicon optical bench

Conference Paper (2012)
Author(s)

JFC van Gurp (TU Delft - Micro and Nano Engineering)

Marcel Tichem (TU Delft - Micro and Nano Engineering)

Urs Staufer (TU Delft - Micro and Nano Engineering)

Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1007/978-3-642-28163-1_3
More Info
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Publication Year
2012
Language
English
Research Group
Micro and Nano Engineering
Pages (from-to)
17-27
ISBN (print)
978-3-642-28162-4

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