Design, fabrication and testing of assembly features for enabling sub-micron accurate passive alignment of photonic chips on a silicon optical bench
Conference Paper
(2012)
Author(s)
JFC van Gurp (TU Delft - Mechanical Engineering)
M Tichem (TU Delft - Mechanical Engineering)
U Staufer (TU Delft - Mechanical Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1007/978-3-642-28163-1_3
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:570ef4cc-7dab-484a-861f-38a9f66f8326
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Publication Year
2012
Language
English
Research Group
Micro and Nano Engineering
Pages (from-to)
17-27
Publisher
Springer
ISBN (print)
978-3-642-28162-4
Event
6th IFIP WG 5.5 Seminar - IPAS 2012, Chamonix, France (2012-02-12 - 2012-02-15), Berlin-Heidelberg
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