Technology for spatial light modulators based on reflective silicon structures

Sakarya, S; Vdovin, G; Sarro, P. M.

Technology for spatial light modulators based on reflective silicon structures

Conference paper (2001)

Authors

S Sakarya Electronic Instrumentation

G Vdovin External organisation

P. M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Instrumentation

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Published Date

2001

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Research Group

Electronic Instrumentation

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