Technology for spatial light modulators based on reflective silicon structures
Conference Paper
(2001)
Author(s)
S Sakarya (TU Delft - Electronic Instrumentation)
G Vdovin (External organisation)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:574495fc-a3d2-4b3c-8856-153ee23b102d
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
25-30
ISBN (print)
0-7923-7012-0
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