Silicon micro-optics for smart light control

Micromachining techniques for fabrication of integrated light modulating devices

A practical galvanic etch-stop in Koh using sodium hypochlorite

Copper film microgrid through-wafer metalization

Technology for integrated spatial light modulators based on reflective membranes

Technology of spatial light modulators based on viscoelastic layers

Technology for integrated spatial light modulators based on viscoelastic layers

Technology of reflective manbranes for spatial light modulators

Technology for integrated spatial light modulators based on reflective membranes

Micromachined spatial light modulators based on viscoalastic layers

High resolution micromachined projection display progress report on october 2000 - april 2001

Technology for spatial light modulators based on reflective silicon structures

Technology of reflective membranes for spatial light modulators

Flexible silicon micromachined structures for use in integrated spatial light modulators

Reflective 2D pixelated membranes for micromachined spatial light modules

High resolution micromachined projection display progress report on April 1999 - February 2000

High resolution micromachined projection display progress report on February - October 2000

Technology of reflective micromachined pixelated membranes for use in spatial light modulators

Micromachined SLM based on pixelated reflective membranes

Technology of pixelated flexible silicon structures for spatial light modulators