Silicon micro-optics for smart light control

A practical galvanic etch-stop in Koh using sodium hypochlorite

Micromachining techniques for fabrication of integrated light modulating devices

Technology for integrated spatial light modulators based on reflective membranes

Micromachined spatial light modulators based on viscoalastic layers

Technology of spatial light modulators based on viscoelastic layers

Technology for integrated spatial light modulators based on reflective membranes

Technology of reflective manbranes for spatial light modulators

Technology for integrated spatial light modulators based on viscoelastic layers

Copper film microgrid through-wafer metalization

Flexible silicon micromachined structures for use in integrated spatial light modulators

Technology for spatial light modulators based on reflective silicon structures

Technology of reflective membranes for spatial light modulators

High resolution micromachined projection display progress report on october 2000 - april 2001

Technology of reflective micromachined pixelated membranes for use in spatial light modulators

High resolution micromachined projection display progress report on April 1999 - February 2000

High resolution micromachined projection display progress report on February - October 2000

Reflective 2D pixelated membranes for micromachined spatial light modules

Micromachined SLM based on pixelated reflective membranes

Technology of pixelated reflective membranes for spatial light modulators