22 records found
1
Silicon micro-optics for smart light control
A practical galvanic etch-stop in Koh using sodium hypochlorite
Micromachining techniques for fabrication of integrated light modulating devices
Micromachined spatial light modulators based on viscoalastic layers
Copper film microgrid through-wafer metalization
Technology of spatial light modulators based on viscoelastic layers
Technology for integrated spatial light modulators based on viscoelastic layers
Technology for integrated spatial light modulators based on reflective membranes
Technology of reflective manbranes for spatial light modulators
High resolution micromachined projection display progress report on october 2000 - april 2001
Technology for spatial light modulators based on reflective silicon structures
Flexible silicon micromachined structures for use in integrated spatial light modulators
Technology of reflective membranes for spatial light modulators
High resolution micromachined projection display progress report on April 1999 - February 2000
High resolution micromachined projection display progress report on February - October 2000
Reflective 2D pixelated membranes for micromachined spatial light modules
Technology of reflective micromachined pixelated membranes for use in spatial light modulators
Technology of pixelated flexible silicon structures for spatial light modulators
High power laser diode to fiber coupling using a membrane mirror