Copper film microgrid through-wafer metalization
Conference Paper
(2002)
Author(s)
VG Kutchoukov (TU Delft - Electronic Instrumentation)
G Craciun (TU Delft - Electronic Instrumentation)
S Sakarya (TU Delft - Electronic Instrumentation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:d4b28a01-3b02-4b46-ace6-153dfde8f08f
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Publication Year
2002
Research Group
Electronic Instrumentation
Pages (from-to)
91-94
ISBN (print)
973-0-02472-3
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