Positronium for depth selective analysis of structuarally ordered porosity in mesoporous low-k silica films
Conference Paper
(2003)
Author(s)
A van Veen (TU Delft - Old - Section Defects in Materials)
R Escobar Galindo (TU Delft - Old - Section Defects in Materials)
S. W.H. Eijt (TU Delft - Old - Section Defects in Materials)
CV Falub (TU Delft - Old - Section Defects in Materials)
H. Schut (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
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https://resolver.tudelft.nl/uuid:59c7b194-4b0a-4bb1-94ae-457c590019c9
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Publication Year
2003
Research Group
Old - Section Defects in Materials
Pages (from-to)
29-45
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