6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna

Conference paper (2014)

Authors

Choonsup Lee California Institute of Technology
G. Chattopadhyay California Institute of Technology
M. Alonso Del Pino Technical University of Catalonia - BarcelonaTech (UPC)
Nuria Llombart Tera-Hertz Sensing - EEMCS
Research Group
Tera-Hertz Sensing (EEMCS) (TU Delft)
Silicon Arrays Etching Lenses Antenna arrays Resists Micromachining
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Tera-Hertz Sensing

Abstract

In this paper, we have microfabricated a 6.4 mm diameter silicon lens array on a 4 inch silicon wafer using silicon micromachining technique. The goal of this lens array is to build a 2×2 lens antenna array for 1.9 THz receiver application. It requires multiple thick photoresist coatings and long selective etching of silicon and photoresist after thermal reflow process. To the authors' knowledge, this is the biggest silicon lens ever microfabricated by semiconductor process.