Property of single-crystalline Si TFTs fabricated with µ-Czochralski (Grain Filter) process
Conference Paper
(2003)
Author(s)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
PC van der Wilt (TU Delft - Electronic Components, Technology and Materials)
BD van Dijk (TU Delft - Electronic Components, Technology and Materials)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:5a752f59-d761-4a5d-8971-e1c593d83ce6
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Publication Year
2003
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
10-19
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