Concept and demonstration of individual probe actuation in two-dimensional parallel Atomic force microscope system

Journal article (2007)

Authors

T Akiyama External organisation
L Aeschiman External organisation
L Chantada External organisation
NF de Rooij External organisation
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2007

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering