Bending and stretching studies on ultra-thin silicon substrates
Conference Paper
(2005)
Author(s)
L. . Wang (External organisation)
Kaspar Jansen (TU Delft - Dynamics of Micro and Nano Systems)
M. Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
A Polyakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
LJ Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:5dfc60c1-e032-46ef-9030-bddb7ea9e381
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Publication Year
2005
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
682-686
ISBN (print)
0-7803-9449-6
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