Prediction of thermo-mechanical integrity of wafer backend processes
Conference Paper
(2003)
Author(s)
V Gonda (TU Delft - Dynamics of Micro and Nano Systems)
JMJ den Toonder (External organisation)
J Beijer (External organisation)
GQ Zhang (External organisation)
RJOM Hoofman (TU Delft - Old - Section Radiation Chemistry)
LJ Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:5f12d879-9a00-485d-8f06-00926e3b0952
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Publication Year
2003
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
359-363
ISBN (print)
0-7803-7054-6
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