Determination of the full scattering matrix using coherent Fourier scatterometry

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Determination of the full scattering matrix using coherent Fourier scatterometry

Journal Article (2016)

Author(s)

Nitish Kumar (TU Delft - ImPhys/Optics)

Luca Cisotto (TU Delft - ImPhys/Optics)

Sarathi Roy (TU Delft - ImPhys/Optics)

GKP Ramanandan

Silvania F. Pereira (TU Delft - ImPhys/Optics)

H. Paul Urbach (TU Delft - ImPhys/Optics)

Interferometry Phase measurement Diffraction theory Scattering measurements

DOI related publication

https://doi.org/10.1364/AO.55.004408 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:5f227f8c-1eb4-46d9-b525-d78289387cd8

More Info

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Publication Year

2016

Language

English

Issue number

16

Volume number

55

Pages (from-to)

4408-4413

Downloads counter

150

Abstract

We demonstrate a method to obtain within an arbitrary numerical aperture (NA) the entire scattering matrix of a scatterer by using focused beam coherent Fourier scatterometry. The far-field intensities of all scattered angles within the NA of the optical system are obtained in one shot. The corresponding phases of the field are obtained by an interferometric configuration. This method enables the retrieval of the maximum available information about the scatterer from scattered far-field data contained in the given NA of the system.