Multi-Scale modeling of chemical vapor deposition processes for thin film technology

Journal article (2007)

Authors

C.R. Kleijn MSP/Thermal & Materials Processes
R Dorsman MSP/Thermal & Materials Processes
KJ Kuijlaars Old - sect Kramers Laboratory (MSP/FT)
M Okkerse Old - sect Kramers Laboratory (MSP/FT)
H van Santen Old - sect Kramers Laboratory (MSP/FT)
Research Group
MSP/Thermal & Materials Processes
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Published Date

2007

Language

Undefined/Unknown

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Research Group

MSP/Thermal & Materials Processes