Multi-Scale modeling of chemical vapor deposition processes for thin film technology
Journal Article
(2007)
Author(s)
C. R. Kleijn (TU Delft - MSP/Thermal & Materials Processes)
R. Dorsman (TU Delft - MSP/Thermal & Materials Processes)
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
M Okkerse (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
H van Santen (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Research Group
MSP/Thermal & Materials Processes
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https://resolver.tudelft.nl/uuid:5f3d9791-66d9-4ff4-ba0d-724f707e4a0e
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Publication Year
2007
Research Group
MSP/Thermal & Materials Processes
Issue number
1
Volume number
303
Pages (from-to)
362-380
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