Extended-source interferometry for at-wavelength testing of EUV optics.

Conference Paper (1999)
Author(s)

M. Visser (External organisation)

M. Dekker (External organisation)

PE Hegeman (External organisation)

JJM Braat (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
More Info
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Publication Year
1999
Research Group
ImPhys/Optics
Pages (from-to)
253-264

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