Extended-source interferometry for at-wavelength testing of EUV optics.
Conference Paper
(1999)
Author(s)
M. Visser (External organisation)
M. Dekker (External organisation)
PE Hegeman (External organisation)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:5f97cc1a-783c-4818-8b49-551962c8a0b5
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Publication Year
1999
Research Group
ImPhys/Optics
Pages (from-to)
253-264
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