Mechanical study of silicon nitride layers of thin flexible substrates under bending
Conference Paper
(2009)
Author(s)
B.A.Z. Mimoun (TU Delft - Electronic Components, Technology and Materials)
O Gourhant (External organisation)
R. Dekker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:5ffa1cb9-fab6-4e0b-888d-9fe4aebadf61
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Publication Year
2009
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
95-98
ISBN (print)
978-90-73461-62-8
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