A ±0.4°C (3¿) -70 to 200°C time-domain temperature sensor based on heat diffusion in Si and SiO2

Conference paper (2012)

Authors

C.P.L. van Vroonhoven Electronic Instrumentation - EEMCS
D d'Aquino External organisation
K.A.A. Makinwa Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation