Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]
Conference Paper
(1998)
Author(s)
J. Shi (External organisation)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
K Grimm (External organisation)
CCG Visser (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:6364a966-e664-456f-92a1-45d92f4c5e44
More Info
expand_more
expand_more
Publication Year
1998
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
515-519
ISBN (print)
90-73461-15-4
No files available
Metadata only record. There are no files for this record.