Improved in plane thermal folded V-beam actuator for optical fibre alignment
Journal Article
(2008)
Author(s)
VA Henneken (TU Delft - Micro and Nano Engineering)
WP Sassen (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:650a284d-5f76-4276-a07a-0aedaf983fb7
More Info
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Publication Year
2008
Research Group
Micro and Nano Engineering
Volume number
18
Pages (from-to)
1-9
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