Investigation of Electrostatic Self-alignment for Batch Micro-Assembly
Conference Paper
(2008)
Author(s)
I Kurniawan (TU Delft - Micro and Nano Engineering)
M. Tichem (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:653c91ae-2314-48d3-b539-1845ddc8bd03
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Publication Year
2008
Research Group
Micro and Nano Engineering
Pages (from-to)
174-178
ISBN (print)
978-0-9553082-5-3
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