Surface micromachined CMOS compatible vertical accelerometer
Conference Paper
(2004)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:6632faa2-30ce-49c7-a210-92e1edd324b2
More Info
expand_more
expand_more
Publication Year
2004
Research Group
Electronic Instrumentation
Bibliographical Note
ed. is niet bekend@en
Pages (from-to)
1-4
ISBN (print)
954-438-386-7
No files available
Metadata only record. There are no files for this record.