Surface micromachined CMOS compatible vertical accelerometer

Conference Paper (2004)
Author(s)

L Pakula (TU Delft - Electronic Instrumentation)

H Yang (TU Delft - Electronic Instrumentation)

Paddy French (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2004
Research Group
Electronic Instrumentation
Bibliographical Note
ed. is niet bekend@en
Pages (from-to)
1-4
ISBN (print)
954-438-386-7

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