Improved thermal U-beam actuators for micro-assembly
Journal Article
(2008)
Author(s)
VA Henneken (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:67f5f124-4013-4eb4-9c6a-e298fa2ccb14
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Publication Year
2008
Research Group
Micro and Nano Engineering
Volume number
142
Pages (from-to)
298-305
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