Through-wafer interconnect technology for silicon
Journal Article
(2004)
Author(s)
VG Kutchoukov (TU Delft - Electronic Instrumentation)
M Shikida (External organisation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:684cc87e-e40c-4f59-8b9c-9577dd9be519
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Publication Year
2004
Research Group
Electronic Instrumentation
Volume number
14
Pages (from-to)
1029-1036
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