Design and Validation of a Hybrid Tunable Magnet Actuator for Gravity Compensation in a 6-DoF Levitated Stage
N. Verzijl (TU Delft - Mechanical Engineering)
S.H. HosseinNia Kani – Mentor (TU Delft - Mechanical Engineering)
E.P. Ronaes – Mentor (TU Delft - Mechanical Engineering)
Coen Custers – Mentor (MI-Partners Bv)
Leon Jabben – Mentor (MI-Partners Bv)
R.A.J. van Ostayen – Graduation committee member (TU Delft - Mechanical Engineering)
J. Dong – Graduation committee member (TU Delft - Electrical Engineering, Mathematics and Computer Science)
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Abstract
Lorentz and reluctance actuators are widely applied in high-precision motion systems as they provide non-contact forces without backlash, thereby enabling nanometer-scale positioning. However, sustaining gravitational offset forces requires a continuous current supply, causing heat losses and consequently thermal positioning drift. Hybrid tunable magnet actuators (HTMAs) provide adjustable offset forces without continuous power consumption. However, existing designs are single-DoF, short-stroke (0.5 - 1 mm), and require flexures to compensate for parasitic forces. This work presents an HTMA for gravity compensation in a 6-DoF levitated stage with an increased 4 mm XYZ-stroke and continuous Z-rotation. A force tuning range of -7.39 N to 7.41 N is experimentally demonstrated at the central mover position. In addition, the actuator exhibits relatively low stiffness variation and limited parasitic forces and torques over the motion range. For efficient tunable gravity compensation, the HTMA could operate in parallel with a passive magnetic system that provides the nominal force and counteracts the HTMA stiffness
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