Integrated SiGe Detectors for Si Photonic Sensor Platforms
Gregory Pandraud (TU Delft - EKL Processing)
S Milosavljevic (TU Delft - EKL Processing)
A. Sammak (TU Delft - QuTech Advanced Research Centre, TU Delft - Business Development)
Matteo Cherchi (VTT Technical Research Center of Finland)
A. Jovic (TU Delft - EKL Processing)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
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Abstract
In this work, we present the results of integrated Ge detectors grown on a Si photonic platform for sensing applications. The detectors are fabricated on a passive photonic circuit for maximum coupling efficiency. Measurement results at 1300 nm wavelength show a responsivity of 0.2 A/W and very low dark current levels. For a voltage range between 0 and −10 V, the dark current is better than 0.1 nA which is crucial for highly sensitivity devices and applications, like Optical
Coherence Tomography.
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