Load balancing in piezoelectric actuation

Conference paper (2009)

Authors

J. van Hulzen External organisation
G Schitter Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
P van den Hof External organisation
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

High control performance i essential in manu precision positioning applications, such as control of the vertical sample position in a atomic-force microscope (AFM). This paper investigates the impact of load flexibility on piexoelectrically actuated positioning systems in terms of control performance. The modeling method used combines model analysis with simple transfer function manipulations, and shows, how the load dynamics may influence the ocntrol performance. The analysis is experimentally verified on a commercial AFM system.