The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

Verduin, T.; Lokhorst, SR; Kruit, Pieter; Hagen, Cornelis W.

The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

Conference paper (2015)

Authors

T. Verduin ImPhys/Charged Particle Optics

SR Lokhorst External organisation

Pieter Kruit ImPhys/Charged Particle Optics

Cornelis W. Hagen ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

2015

Language

English

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Research Group

ImPhys/Charged Particle Optics

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