Capping layers for extreme-ultraviolet multilayer interference coatings.

Journal Article (2001)
Author(s)

M Singh (TU Delft - ImPhys/Optics)

J.J.M. Braat (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
More Info
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Publication Year
2001
Research Group
ImPhys/Optics
Volume number
26
Pages (from-to)
259-261

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