Dry self-alignment for batch-assembly of chips
Conference Paper
(2009)
Author(s)
I Kurniawan (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
Urs Staufer (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
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https://resolver.tudelft.nl/uuid:6b351e2d-f504-439d-b8ea-7e38660d1def
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Publication Year
2009
Research Group
Micro and Nano Engineering
Pages (from-to)
212-215
ISBN (print)
978-1-4244-4193-8
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