C-V profiling of ultra-shallow junctions using step-like background profiles

Journal article (2010)

Authors

M Popadic Electronic Components, Technology and Materials - EEMCS
V Milovanovic Electronic Components, Technology and Materials - EEMCS
Chengcheng Xu External organisation
F Sarubbi Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials