C-V profiling of ultra-shallow junctions using step-like background profiles
Journal Article
(2010)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
V Milovanovic (TU Delft - Electronic Components, Technology and Materials)
C. Xu (External organisation)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.sse.2010.04.028
To reference this document use:
https://resolver.tudelft.nl/uuid:6b8b5360-0e75-43e3-b771-9df4aeafd5ed
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
9
Volume number
54
Pages (from-to)
890-896
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