C-V profiling of ultra-shallow junctions using step-like background profiles

Journal Article (2010)
Author(s)

M Popadic (TU Delft - Electronic Components, Technology and Materials)

V Milovanovic (TU Delft - Electronic Components, Technology and Materials)

C. Xu (External organisation)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.sse.2010.04.028
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
9
Volume number
54
Pages (from-to)
890-896

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