34 records found
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Characterization of pure boron depositions integrated in silicon diodes for nanometer deep junction applications
Deep p+ junctions formed by drive-in from pure boron depositions
Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range
C-V profiling of ultra-shallow junctions using step-like background profiles
Pure boron chemical vapor deposited layers; A new material for silicon device processing
High effective gummel number of CVD boron layers in ultrashallow p+n diode configurations
Chemical vapor deposition of alpha-boron layers on silicon for controlled nanometer deep p+n junction formation
C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile
Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes
Improved RF devices for future adaptive wireless systems using two-sided contacting and AIN cooling
Application of amorphous boron layer as diffusion barrier for pure aluminium
high performance silicon based extreme ultraviolet radiation detector for industrial application
Controlled Growth of Non-uniform Arsenic Profiles in Silicon RPCVD Epitaxial Layers
Ultra linear low-loss varactor diode configurations for adaptive RF systems
Response time of shallow junction silicon photodiodes
Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology
Special RF/microwave devices in silicon-on-glass technology
RF/microwave device fabrication in silicon-on-glass technology
Enabling low-distortion varactors for adaptive transmitters
A 67 dBm OIP multi-stacked junction varactor